Login / Signup
Experimental study of multilayer SiCN barrier film in 45/40 nm technological node and beyond.
Ming Zhou
Xiao De Yuan
Peng Shi Min
Hong Zhong Shan
Shu Yi Xie
Published in:
Microelectron. Reliab. (2016)
Keyphrases
</>
experimental study
directed graph
synthetic datasets
socio technical
experimental evaluation
tree structure
single layer
motion picture
real time
data sets
information systems
random walk