15.6 A 30-to-80MHz simultaneous dual-mode heterodyne oscillator targeting NEMS array gravimetric sensing applications with a 300zg mass resolution.
Guillaume GourlatMarc SansaPatrick VillardGilles SicardGuillaume JourdanIssam OuerghiGérard BilliotSebastien HentzPublished in: ISSCC (2017)