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Development of cluster ion source based on modulated pulse power magnetron sputtering technique.
Chuhang Zhang
Hironori Tsunoyama
Hiroki Akatsuka
Hiroki Sekiya
Tomomi Nagase
Atsushi Nakajima
Published in:
NEMS (2013)
Keyphrases
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power consumption
development process
case study
data clustering
information technology
decision support
knowledge based systems
learning algorithm
metadata
data points
object oriented
high speed
information processing
design principles
rapid development
development environment