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Measuring time-dependent deformations in metallic MEMS.

L. I. J. C. BergersJ. P. M. HoefnagelsN. K. R. DelheyMarc G. D. Geers
Published in: Microelectron. Reliab. (2011)
Keyphrases
  • three dimensional
  • travel time
  • databases
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  • image registration
  • image processing
  • web services
  • artificial neural networks
  • evolutionary algorithm