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Pneumatic Servo Bearing Actuator with Multiple Bearing Pads for Ultraprecise Positioning.

Shuhei TsujimuraYusuke HashimotoTakashi MatsuokaTomoko HirayamaKatsumi Sasaki
Published in: Int. J. Autom. Technol. (2013)
Keyphrases
  • control system
  • degrees of freedom
  • search algorithm
  • databases
  • neural network
  • data mining
  • e learning
  • web services
  • multiscale
  • hidden markov models
  • closed loop
  • force control