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Optimal integrated schedule of entire process of dual-blade multi-cluster tools from start-up to close-down.

Qinghua ZhuYan QiaoNaiqi Wu
Published in: IEEE CAA J. Autom. Sinica (2019)
Keyphrases
  • input output
  • scheduling problem
  • optimal solution
  • decision support
  • building blocks
  • databases
  • genetic algorithm
  • search engine
  • clustering algorithm
  • case study
  • dynamic programming
  • worst case
  • process model
  • closed form