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A MEMS Capacitive Resonator as an Acoustic Sensor for Photoacoustic Spectroscopy.

Yonggang YinDanyang RenYuqi WangDa GaoJunhui Shi
Published in: SENSORS (2023)
Keyphrases
  • source localization
  • sensor data
  • x ray
  • sensor networks
  • real time
  • infrared
  • sensor array
  • multi sensor
  • vision sensor
  • data sets
  • sound source
  • time of flight
  • sensor technology
  • speech recognition systems
  • bird species