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An AlN Micromachined Mass Sensor: Modeling and Characterization.

Ada FortCarlo TrigonaEnza PanzardiValerio VignoliTommaso AddabboMarco Mugnaini
Published in: IEEE Trans. Instrum. Meas. (2021)
Keyphrases
  • real time
  • modeling framework
  • database
  • neural network
  • learning styles
  • sensor data
  • modeling language
  • high sensitivity