An Improved Dimensional Measurement Method of Staircase Patterns With Higher Precision in 3D NAND.
Peizhen HongZhiguo ZhaoJun LuoZhiliang XiaXiaojing SuLibin ZhangChunlong LiZongliang HuoPublished in: IEEE Access (2020)
Keyphrases
- experimental evaluation
- significant improvement
- preprocessing
- pairwise
- cost function
- computationally efficient
- detection method
- similarity measure
- objective function
- classification accuracy
- high precision
- theoretical analysis
- classification method
- dimensional vector
- image segmentation
- tree structure
- detection algorithm
- optimization algorithm
- high accuracy
- prior knowledge