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Adaptive mesh refinement for multilayer process simulation using the finite element method.

Bruno BaccusDominique CollardEmmanuel Dubois
Published in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (1992)
Keyphrases
  • mesh refinement
  • special case
  • simulation study
  • databases
  • information retrieval
  • artificial intelligence
  • bayesian networks
  • learning environment
  • information technology
  • probabilistic model
  • simulation models