Electrostatic-Fluid-Structure 3D Numerical Simulation of a MEMS Electrostatic Comb Resonator.

Zhanqing Yu Shiping Chen Ya Mou Fade Hu

Published in: Sensors (2022)

Keyphrases

numerical simulations
fluid dynamics
navier stokes
numerical calculation
theoretical analysis
fluidized bed
multiresolution
color images
fixed point
finite element model
computational fluid dynamics