Simulation-based optimization for groups of cluster tools in semiconductor manufacturing using simulated annealing.
Tobias UhligOliver RosePublished in: WSC (2011)
Keyphrases
- semiconductor manufacturing
- simulated annealing
- simulation based optimization
- discrete event simulation
- cluster analysis
- process control
- clustering algorithm
- simulated annealing algorithm
- software tools
- end users
- tabu search
- higher level
- similar objects
- optimization method
- data clustering
- high level
- production system
- optimization methods
- machine learning
- optimization problems
- evolutionary algorithm
- expert systems
- genetic algorithm