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Monolithic SOI-MEMS capacitive pressure sensor with standard bulk CMOS readout circuit.
Miikka Ylimaula
Markku Åberg
Jyrki Kiihamaki
Hannu Ronkainen
Published in:
ESSCIRC (2003)
Keyphrases
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high speed
circuit design
silicon on insulator
analog vlsi
real time
delay insensitive
image sensor
sensor networks
cmos technology
data sets
cmos image sensor
focal plane
multi sensor
power consumption
sensor data
sensor fusion
low voltage
analog to digital converter
low cost