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Sampling Points Selection Algorithm For Advanced Photolithography Process.

Aris MagklarasChristos GogosPanagiotis AlefragisChristos ValouxisAlexios N. Birbas
Published in: SEEDA-CECNSM (2022)
Keyphrases
  • selection algorithm
  • prototype selection
  • image processing
  • feature vectors
  • active learning
  • motion estimation
  • feature points
  • sample size
  • process model
  • resource selection