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H2 annealing for metallic contaminant reduction in BCD-SOI process: Benefits and drawbacks.

Gabriella GhidiniDaniele MerliniMassimiliano CannavoMaria Luisa PolignanoIsabella MicaAmos GalbiatiLucia ZullinoRiccardo TurconiSalvatore GrassoMaurizio MoroniDavide Codegoni
Published in: ESSDERC (2015)
Keyphrases
  • process model
  • information retrieval
  • knowledge base
  • multiscale
  • data structure
  • learning environment
  • special case
  • mobile robot
  • low cost
  • simulated annealing
  • reduction method