H2 annealing for metallic contaminant reduction in BCD-SOI process: Benefits and drawbacks.
Gabriella GhidiniDaniele MerliniMassimiliano CannavoMaria Luisa PolignanoIsabella MicaAmos GalbiatiLucia ZullinoRiccardo TurconiSalvatore GrassoMaurizio MoroniDavide CodegoniPublished in: ESSDERC (2015)