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Long-term tool elimination planning for a wafer fab.
Shu-Hsing Chung
Ming-Hsiu Hsieh
Published in:
Comput. Ind. Eng. (2008)
Keyphrases
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long term
short term
mission planning
software tools
integrated circuit
semiconductor manufacturing
database systems
expert systems
decision making
state space
software engineering
orders of magnitude
real world
planning problems
plan recognition
ai planning
goal oriented
stochastic domains
real time