Simulation modeling and visualization of start-up transient processes of dual-arm cluster tools with wafer revisiting.
ChunRong PanMengChu ZhouYan QiaoNaiqi WuPublished in: SMC (2014)
Keyphrases
- visualization tools
- discrete event simulation
- semiconductor manufacturing
- visualization tool
- simulation tools
- software tools
- clustering algorithm
- electro mechanical systems
- user friendly
- data analysis
- steady state
- mathematical models
- self organizing maps
- information visualization
- decision support
- exploratory data analysis
- data clustering
- mathematical model
- stochastic processes
- data points
- case study
- dynamic aspects
- data sets