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Characterization Of The Deformation Of Micro-Components Using Optical Interferometry.

S. H. WangC. QuanC. J. TayI. ReadingZ. P. Fang
Published in: Int. J. Comput. Eng. Sci. (2003)
Keyphrases
  • image registration
  • fiber optic
  • least squares
  • x ray
  • building blocks
  • vector field
  • closely spaced