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The implementation of neural network for semiconductor PECVD process.

Wen-Chin ChenAmy H. I. LeeWei-Jaw DengKan-Yuang Liu
Published in: Expert Syst. Appl. (2007)
Keyphrases
  • neural network
  • pattern recognition
  • data sets
  • artificial neural networks
  • fuzzy logic
  • process model
  • prediction model
  • multiscale
  • multi agent
  • bp neural network
  • multi layer
  • network model
  • network architecture