Micro-device array LED processes on CMOS/MEMS substrate.

Jian-Chiun Liou Wen-De Lin

Published in: NEMS (2017)

Keyphrases

electro mechanical systems
analog to digital converter
image sensor
focal plane
semiconductor devices
database
circuit design
random access memory
low cost
infrared
data acquisition
power consumption
genetic algorithm
high speed
force feedback
metal oxide semiconductor