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Development of Six-Degree-of-Freedom Inertial Sensors With an 8-in Advanced MEMS Fabrication Platform.
Guoqiang Wu
Beibei Han
Daw Don Cheam
Leong Ching Wai
Peter Hyun Kee Chang
Navab Singh
Yuandong Gu
Published in:
IEEE Trans. Ind. Electron. (2019)
Keyphrases
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inertial sensors
real time
sensor fusion
three dimensional