Integrated Scheduling of Jobs, Reticles, Machines, AMHS and ARHS in a Semiconductor Manufacturing.
Andy HamMyoung-Ju ParkHo-Jun ShinSi-Young ChoiJohn W. FowlerPublished in: WSC (2020)
Keyphrases
- semiconductor manufacturing
- identical machines
- identical parallel machines
- parallel machines
- scheduling problem
- processing times
- flowshop
- wafer fabrication
- discrete event simulation
- fixed number
- job scheduling
- release dates
- scheduling jobs
- unrelated parallel machines
- single machine
- parallel machine scheduling problem
- minimize total
- precedence constraints
- sequence dependent setup times
- process control
- scheduling decisions
- single server
- production system
- setup times
- weighted tardiness
- maximum lateness
- scheduling algorithm
- manufacturing cell
- scheduling policies
- optimal scheduling
- scheduling strategy
- dispatching rule
- release times
- deteriorating jobs
- computational grids
- batch processing
- production scheduling
- job shop scheduling problem
- parallel computing
- shared memory
- dynamic systems
- branch and bound algorithm
- tabu search
- supply chain
- state space
- information systems
- artificial intelligence