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MEMS Gas Sensors with Metal-Oxide Semiconductor Materials Patterned at Wafer-Level by Photolithography Technique.

Xiaojiang LiuGaoqiang NiuJin LiYi ZhuangXitong SunFei Wang
Published in: SENSORS (2023)
Keyphrases
  • integrated circuit
  • circuit board
  • metal oxide semiconductor
  • genetic algorithm
  • semiconductor manufacturing
  • real time
  • sensor networks
  • low cost
  • sensor data
  • manufacturing systems
  • image processing
  • image analysis