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Experimental analysis and optimization of a photo resist coating process for photolithography in wafer fabrication.
Yung-Kuang Yang
Tsun-Ching Chang
Published in:
Microelectron. J. (2006)
Keyphrases
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wafer fabrication
coating process
optimization algorithm
optimization problems
input parameters
fluidized bed
neural network
integrated circuit
genetic algorithm
image analysis
combinatorial optimization