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A novel scheme design of a high-g optical NEMS accelerometer based on a single chip grating with proper sensitivity and large bandwidth.
Qianbo Lu
Jian Bai
Wenxiu Lian
Shuqi Lou
Published in:
NEMS (2015)
Keyphrases
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single chip
low power
image sensor
low cost
cmos image sensor
low power consumption
multiresolution