Low-Cost Lithography Hotspot Detection with Active Entropy Sampling and Model Calibration.
Yifeng XiaoMiaodi SuHaoyu YangJianli ChenJun YuBei YuPublished in: DAC (2021)
Keyphrases
- low cost
- probabilistic model
- management system
- computational model
- theoretical framework
- sampling algorithm
- objective function
- false alarms
- automatic detection
- information theoretic
- experimental data
- statistical model
- mathematical model
- detection algorithm
- parameter estimation
- probability distribution
- cost function