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Multivariable model predictive control of thin film surface roughness and slope: Application to a 2D kinetic Monte-Carlo model.

Xinyu ZhangGerassimos OrkoulasPanagiotis D. Christofides
Published in: ACC (2011)
Keyphrases
  • monte carlo
  • monte carlo simulation
  • model predictive control
  • real time
  • markov chain
  • decision making
  • mathematical model
  • thin film
  • neural network
  • learning algorithm
  • simulation model
  • transfer function