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Dual-Loop Iterative Learning Control With Application to an Ultraprecision Wafer Stage.

Min LiTaotao ChenRong ChengKaiming YangYu ZhuCaohui Mao
Published in: IEEE Trans. Ind. Electron. (2022)
Keyphrases
  • iterative learning control
  • genetic algorithm
  • real time
  • feature space
  • iterative learning