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Multi-Feature Shuffle Algorithm for Root Cause Detection in Semiconductor Manufacturing.

Ding TanXingyu XuKaixiang YuSihai ZhangTianchi Chen
Published in: DASC/PiCom/CBDCom/CyberSciTech (2021)
Keyphrases
  • multi feature
  • improved algorithm
  • root cause
  • dynamic programming
  • learning algorithm
  • computational cost
  • semiconductor manufacturing
  • real time
  • feature selection
  • segmentation algorithm