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A novel electrodes design for in-plane measurement of single-structure multi-axis MEMS inertial devices.
Jianjun Ma
Bowen Xing
Jiayang Sun
Bin Zhou
Qi Wei
Rong Zhang
Published in:
NEMS (2023)
Keyphrases
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three dimensional
knowledge based systems
case study
learning environment
video sequences
user interface
software engineering
building blocks
design process
hierarchical structure
embedded systems
geometric structure
design decisions