Machine learning enabled optimization of showerhead design for semiconductor deposition process.
Zeqing JinDahyun Daniel LimXueying ZhaoMeenakshi MamunuruSassan RohamGrace X. GuPublished in: J. Intell. Manuf. (2024)
Keyphrases
- machine learning
- design process
- optimal design
- optimization process
- computer vision
- learning systems
- support vector machine
- active learning
- pattern recognition
- case study
- information extraction
- natural language processing
- computational intelligence
- knowledge acquisition
- building blocks
- process model
- global optimization
- knowledge engineering