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Large Scale Mask Optimization Via Convolutional Fourier Neural Operator and Litho-Guided Self Training.

Haoyu YangZongyi LiKumara SastrySaumyadip MukhopadhyayAnima AnandkumarBrucek KhailanyVivek SinghHaoxing Ren
Published in: CoRR (2022)
Keyphrases