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Micro-hotplates for thermal characterisation of structural materials of MEMS.

P. CsíkváriPéter FürjesCsaba DücsoIstván Bársony
Published in: Microelectron. J. (2009)
Keyphrases
  • thermal conductivity
  • infrared
  • structural information
  • three dimensional
  • structural analysis
  • composite materials
  • digital libraries
  • data sets
  • social networks
  • face recognition
  • structural model