A 64-Mb embedded FRAM utilizing a 130-nm 5LM Cu/FSG logic process.

Hugh P. McAdams Randy Acklin Terry Blake Xiao-Hong Du Jarrod Eliason John Y. Fong William F. Kraus David Liu Sudhir Madan Ted Moise Sreedhar Natarajan Ning Qian Yunchen Qiu Keith Remack J. Rodriguez John Roscher Anand Seshadri Scott R. Summerfelt

Published in: IEEE J. Solid State Circuits (2004)

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