Login / Signup

Influence of SiC epitaxial wafer quality on yield of 1.2kV SiC-DMOSFETs.

Junji SenzakiRyoji KosugiKeiko MasumotoTakeshi MitaniTakeharu KuroiwaHiroshi Yamaguchi
Published in: IRPS (2022)
Keyphrases
  • high quality
  • machine learning
  • quality assessment
  • higher quality
  • thin film
  • artificial intelligence
  • decision making
  • database systems
  • data structure
  • evolutionary algorithm