Molecular effusion-boltzmann model for parylene C deposition in deep trench.

YinHua Lei Yingcun Luo Wei Wang Zhihong Li

Published in: NEMS (2010)

Keyphrases

network model
data sets
parameter estimation
cost function
experimental data
formal model
data mining
machine learning
high level
probabilistic model
management system
process model
mathematical model
conceptual model
neural network model