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Thomas Scherübl
Publication Activity (10 Years)
Years Active: 2019-2019
Publications (10 Years): 1
Top Topics
Lightweight
Wearable Devices
Early Warning
Top Venues
ESSDERC
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Publications
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Thomas Scherübl
,
Yael Sufrin
,
Avi Cohen
,
Ofir Sharoni
,
Rolf Seltmann
Excursion prevention and increasing device performance using mask correction for intrafield CD and Overlay improvement.
ESSDERC
(2019)