T. Yagisawa

Publication Activity (10 Years)

Years Active: 2007-2007
Publications (10 Years): 0

Publications

Toshiaki Makabe, T. Shimada, Takashi Yagisawa
Plasma etching and feature evolution of organic low-k material by using VicAddress. Comput. Phys. Commun. 177 (1-2) (2007)