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Masaki Kuramochi
ORCID
Publication Activity (10 Years)
Years Active: 2024-2024
Publications (10 Years): 1
Top Topics
Multiscale
Software Engineering
Simulation Tools
Top Venues
IEEE Access
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Publications
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Masaki Kuramochi
,
Yukihide Kohira
,
Hiroyoshi Tanabe
,
Tetsuaki Matsunawa
,
Chikaaki Kodama
Development of a Lithography Simulation Tool Set in Various Optical Conditions for Source Mask Optimization.
IEEE Access
12 (2024)