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Marc Engel
Publication Activity (10 Years)
Years Active: 2019-2021
Publications (10 Years): 3
Top Topics
Domain Independent
Process Control
Semiconductor Manufacturing
Monte Carlo Methods
Top Venues
ETFA
ICPS
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Publications
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Fahad R. Golra
,
Marc Engel
An industrial feedback on the use of OPC UA for the vertical integration of semiconductor front-ends.
ETFA
(2021)
Fahad R. Golra
,
Selma Azaiez
,
Marc Engel
Multi-level modeling to OPC UA for migrating to Industry 4.0 in semiconductor manufacturing.
ICPS
(2020)
Selma Azaiez
,
François Tanguy
,
Marc Engel
Towards building OPC-UA companions for semi-conductor domain.
ETFA
(2019)