M. B. I. Habets

Publication Activity (10 Years)

Years Active: 2019-2019
Publications (10 Years): 1

Top Topics

Relational Databases

Semiconductor Manufacturing

Top Venues

Publications

S. J. Hermanussen, M. B. I. Habets, Marcel François Heertjes, J. P. M. B. Vermeulen
Conformal slip-free wafer chucking using an actuated wafer table. ICCMA (2019)