Laurent Henn-Lecordier

Publication Activity (10 Years)

Years Active: 2000-2004
Publications (10 Years): 0

Publications

Jae-Ouk Choo, Raymond A. Adomaitis, Gary W. Rubloff, Laurent Henn-Lecordier, Yuhong Cai
A new approach to spatially controllable CVD. ACC (2004)
Jeffrey W. Herrmann, Brian F. Conaghan, Laurent Henn-Lecordier, Praveen Mellacheruvu, Manh-Quan Nguyen, Gary W. Rubloff, Rock Z. Shi
Understanding the impact of equipment and process changes with a heterogeneous semiconductor manufacturing simulation environment. WSC (2000)