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Christine E. Murabito
Publication Activity (10 Years)
Years Active: 2008-2008
Publications (10 Years): 0
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Publications
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Michael W. Cresswell
,
Richard A. Allen
,
William F. Guthrie
,
Christine E. Murabito
,
Ronald G. Dixson
,
Amy Hunt
Comparison of SEM and HRTEM CD Measurements Extracted From Test Structures Having Feature Linewidths From 40 to 240 nm.
IEEE Trans. Instrum. Meas.
57 (1) (2008)